In comparison to conventional bulk-micromachined piezoresitive pressure sensors, the innovative microFAB development features numerous improvements, including the exceptionally small volume of less than 0.4 mm³ – an advantage that opens up completely new application options.
Thanks to the implemented capacitive measurement principle on a non-conductive fused-silica substrate, the pressure sensor only displays extremely low parasitic effects. The sensor is also particularly resistant against external influences like shock pressure, temperature or incidental light.
The high sensitivity of the sensor is also noteworthy: despite its broad gauging range a high degree of sensitivity is guaranteed.
The surface micro-machined capacitive pressure sensor needs only extremely little energy for sensor evaluation and the constructive design permits great flexibility when it comes to packaging.