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Pressure Sensor Die Pressure Sensor Packaged Die Pressure Sensor Evaluation

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Pressure Sensor Die E8.0T

Sensor Functionality E8.0T

The sensor is designed as a surface micromachined plate capacitor array with deformable pressure sensitive membranes on top of insulated counter electrodes. This dielectric insulation allows the sensor
to be operational in normal- and touch-mode. During normal operation the membrane deflects freely and does not touch the rigid counter electrode. If pressure is increased the membranes sink down, touch the counter electrodes and roll out as pressure further increases. In touch-mode membrane stress does not increase significantly and as consequence the sensor can withstand very high overpressures with no damage. E8.0T operates in touch-mode and is the best choice if the need for larger temperature and pressure ranges and a less packaging stress sensitive device outranks a reduced accuracy due to sensor hysteresis. An operation in normalmode should be considered if the target application requires a sensor element of high accuracy and a very low hysteresis at higher temperature coefficients (please contact microfab for possible sensor options).

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Datasheet E8.0T [294 KB]

Printable Version

Pressure sensor Die E1.3N